| 摘要 |
PROBLEM TO BE SOLVED: To provide a microstructure which can be used suitably for application of shielding of electromagnetic wave having relatively short wavelengths such as ultraviolet ray and X-ray, and to provide a method of producing the microstructure. SOLUTION: The microstructure includes: a metal substrate; a metal oxide layer existing on the surface of the metal substrate; and a conductive mesh layer existing on the surface of the metal oxide layer; wherein the conductive mesh layer is made of a material having an electrical resistivity of 10<SP>3</SP>Ωcm or less and has through-holes of which the average opening diameter is 3 to 1,000 nm and the density is 1×10<SP>6</SP>to 1×10<SP>10</SP>/mm<SP>2</SP>. COPYRIGHT: (C)2010,JPO&INPIT |
