| 摘要 |
<p>A micro-pump according to the present invention includes a bottom substrate; a flow passage formation substrate combined to the bottom substrate; and a valve substrate having more than one valve for controlling the influx and efflux of a liquid. On a first side of the flow passage formation substrate, an inlet and an outlet are formed, and on a second side of the flow passage formation substrate, a compression chamber for connecting the inlet and the outlet are formed.</p> |
