| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon nanoparticle which has such roughly equal particle size that a variation width (difference between the maximum diameter and the minimum diameter) of particle size is substantially less than 0.5 nm, and to provide a method for producing the silicon nanoparticle. SOLUTION: The fluorescence emitting silicon nanoparticle having roughly equal particle size can be produced by performing the following processes (1) to (3), in the order, of: (1) forming the silicon nanoparticle coated with silicon oxide film on an Si substrate by jointly using a high-frequency sputtering method and heat treatment; (2) treating the Si substrate with the obtained silicon nanoparticles covered with the silicon oxide film with a hydrofluoric acid aqueous solution to isolate and diffuse the silicon nanoparticle from the substrate; and (3) treating a dispersion liquid containing the silicon nanoparticle by combining high-speed centrifuging and ultracentrifuging to classify the silicon nanoparticle in accordance with the particle size. COPYRIGHT: (C)2011,JPO&INPIT |
