首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
SUBSTRATE PROCESSING APPARATUSES AND SYSTEMS
摘要
A system for processing substrates is described. In one embodiment, the system comprises a process chamber, at least one electrical resistance heater, and at least one Coanda effect gas injector.
申请公布号
EP2599108(A4)
申请公布日期
2014.05.21
申请号
EP20110813211
申请日期
2011.07.28
申请人
LAWRENCE ADVANCED SEMICONDUCTOR TECHNOLOGIES, LLC
发明人
COLVIN, RONALD, L.;GOODWIN, DENNIS;MITTENDORF, JEFF;MORETTI, CHARLES, J.;ROSE, JOHN, W.;SAMUELS, EARL, BLAKE
分类号
H01L21/205;C23C16/455;C23C16/46;H05B3/24
主分类号
H01L21/205
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Flyback transformer.
Superconductive apparatus.
Tooth fixing member.
Photopolymerisable image registration material.
Color developer and processing method using the same.
Process and apparatus for the surface culture of nucleated cells and cell culture-dependent substances.
METHOD OF REDUCING LOSSES OF ETHYLENE WHEN EXHAUSTING INERT COMPONENTS FROM THE PRODUCTION OF LINEAR ALPHA OLEFINS
手摇式蔬菜绞馅机
一种小型供暖器
零嵌入力连接座的端子
一种新型自来水笔
一种新型井盖及井圈
一次成型塑料血袋
Acyloxyacyl hydrolase and the use thereof
Alkoxysilanes.
Thermoplastic mouldings from semi-crystalline and amorphous polyamides, their use and process for their production.
THREE-DIMENSIONAL ENERGY DISTRIBUTOR.
Optical Head.
P-code-aided global positioning system receiver.
Muramyl dipeptide derivatives.