发明名称 |
PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXPOSED TO A HEAT LOAD |
摘要 |
<p>Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus.</p> |
申请公布号 |
KR20140061476(A) |
申请公布日期 |
2014.05.21 |
申请号 |
KR20147008468 |
申请日期 |
2012.09.06 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
DOYLE PAUL;BELYAEV ALEXANDER |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|