LASER INDUCED THERMAL IMAGING APPARATUS AND LASER INDUCED THERMAL IMAGING METHOD

摘要

A laser induced thermal transfer device comprises: a substrate stage in which a substrate including an alignment mark is attached; a beam irradiation unit which is located on the substrate stage and irradiates an alignment laser beam to the alignment mark; and a beam observation unit which faces the beam irradiation unit with the substrate stage in between, and observes the alignment laser beam including a shadow of the alignment mark passed through the alignment mark.