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发明名称
形状测量装置用探针及形状测量装置
摘要
申请公布号
TWI438395
申请公布日期
2014.05.21
申请号
TW099106903
申请日期
2010.03.10
申请人
松下电器产业股份有限公司 日本
发明人
八田健一郎;舟桥隆宪
分类号
G01B5/012;G01B7/012;G01B11/00
主分类号
G01B5/012
代理机构
代理人
恽轶群 台北市松山区南京东路3段248号7楼;陈文郎 台北市松山区南京东路3段248号7楼
主权项
地址
日本
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