发明名称 |
INTERFEROMETRY SYSTEMS INVOLVING A DYNAMIC BEAM-STEERING ASSEMBLY |
摘要 |
An apparatus including: a multi-axis interferometry system configured to receive an input beam and direct at least two beams derived from the input beam to contact different locations on a measurement object to monitor changes in an angular orientation of the measurement object; a beam steering assembly having a beam steering element positioned to direct the input beam into the interferometry system and a positioning system to selectively orient the beam steering element relative to the interferometry system; and a control circuit which during operation orients the beam steering element based on the changes in the angular orientation of the measurement object monitored by the interferometry system. |
申请公布号 |
EP1514074(B1) |
申请公布日期 |
2014.05.21 |
申请号 |
EP20030760467 |
申请日期 |
2003.06.17 |
申请人 |
ZYGO CORPORATION |
发明人 |
HILL, HENRY;KREUZER, JUSTIN |
分类号 |
G01B9/02;G01B11/26;G01B11/00;G03F7/20;H01L21/027 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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