| 摘要 |
Fabrication of gear train (51') involves taking a substrate that includes a top layer and a bottom layer made of silicon-based micro-machinable material; etching pattern(s) in top layer and intermediate layer so as to form at least one first cavity belonging to a first wheel set (55'); coating the bottom of first cavity with electrically conductive coating; electroforming a material; etching a second pattern to form a second wheel set (57'); structuring a photosensitive resin, then removing the resin; and continuing electroforming to form an arbor (53'). Fabrication of gear train (51') comprises: (A) taking a substrate that includes a top layer and a bottom layer made of silicon-based micro-machinable material and secured to each other by an intermediate layer; (B) etching pattern(s) in the top layer and the intermediate layer until the bottom layer is exposed, so as to form at least one first cavity belonging to a first wheel set (55'); (C) coating the bottom of the first cavity with an electrically conductive coating; (D) electroforming a material in the bottom of the first cavity; (E) etching a second pattern in the bottom layer as far as the coating of the electrically conductive material, so as to form at least one second cavity belonging to a second wheel set (57'); (F) structuring a photosensitive resin on the bottom of the bottom layer, forming a sheathing on the walls of the second cavity and at least one recess that flares out coaxially from the second cavity; (G) continuing the electroforming started in step (D) so as to fill the first cavity and starting to electroform a material in the second cavity and the recess, so as to form an arbor (53') fitted with a collar (56'); (H) removing the photosensitive resin; (I) removing the intermediate layer so as to separate the first and second wheel sets; and (J) releasing the fabricated wheel set from the substrate. |
