| 摘要 |
<p>The present invention relates to a hand for conveying a substrate. The hand for conveying a substrate comprises: a pair of first substrate support members arranged in parallel with each other; a drive part configured to parallely move the first substrate support members in a direction where the first substrate support members come close to each other or a direction where the first substrate support members are spaced apart from each other; a pair of second substrate support members arranged in parallel with each other in a direction orthogonal to a longitudinal direction of the first substrate support members; a parallel link member configured to connect the first and second substrate support members, to parallely move the second substrate support members in a direction where the second substrate support members come close to each other in conjunction with the parallel movement of the first substrate support members in the direction where the first substrate support members come close to each other, and to parallely move the second substrate support members in a direction where the second substrate support members are spaced apart from each other in conjunction with the parallel movement of the first substrate support members in the direction where the first substrate support members are spaced apart from each other; a plurality of first holding and supporting portions arranged along the longitudinal direction of the first substrate support members, and configured to hold and support the edges of the bottom surface of a substrate; and a plurality of second holding and supporting portions arranged along a longitudinal direction of the second substrate support members, and configured to hold and support the edges of the bottom surface of the substrate.</p> |
