发明名称 |
Sensor arrangement, a measurement circuit, chip-packages and a method for forming a sensor arrangement |
摘要 |
A sensor arrangement is provided, the sensor arrangement including a chip including a sensor circuit configured to detect a bending of the chip; and a package structure configured to protect the chip; wherein the package structure includes a first region and a second region, and wherein the package structure is configured such that it is easier to be deformed in the first region than in the second region. |
申请公布号 |
US8729697(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US201213345865 |
申请日期 |
2012.01.09 |
申请人 |
THEUSS HORST;ELIAN KLAUS;INFINEON TECHNOLOGIES AG |
发明人 |
THEUSS HORST;ELIAN KLAUS |
分类号 |
H01L21/04 |
主分类号 |
H01L21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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