HIGH-VACUUM STATION FOR VACUUM TUBES PUMPING OUT

摘要

FIELD: electricity.SUBSTANCE: high-vacuum station for vacuum tubes pumping out contains a protective enclosure and a vacuum system for pumping out that includes a turbomolecular pump and a dry forepump. Metal cooled walls of the enclosure are divided vertically into two parts by a sealing gasket, one part is movable. On the basis of the fixed part there is an adjuster for vacuum tubes fixation and this adjuster can move with respect to three coordinates. Heaters with independent power supply units are located along the enclosure walls. At the enclosure top there is a collector for nitrogen supply. At the basis there is a manual valve for nitrogen flow control. The vacuum pumping out system is connected to the device through a heated valve. The vacuum pumping out system may be based on a dry spiral forepump.EFFECT: improving reliability and quality of vacuum tubes pumping out, simplifying design of the station and increasing its efficiency.4 cl, 1 dwg