| 摘要 |
In a two-dimensional optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator connected between the movable frame and the mirror and adapted to rock the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator connected between the support body and the movable frame and adapted to rock the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided on the movable frame and adapted to sense rocking vibrations of the mirror caused by the first and second piezoelectric actuators. |
