摘要 |
A diaphragm valve is used to perform opening/closing operations to switch between a state where two flow paths 14a and 15a communicate with each other and a state where the flow paths 14a and 14b are blocked from communicating with each other. A diaphragm unit 31 which is disposed in a valve housing 13 has a hollow valve body 32 capable of being reciprocated in the axial direction, the diaphragm unit 31 is formed with a communication flow path 32a through which two flow paths 14a and 14b are communicated with each other. A first diaphragm 34 is provided to one end portion of a hollow valve body 32, and a second diaphragm 36 is provided to the other end of the hollow valve body 32, when the hollow valve body 32 is moved in its axial direction and abuts on a valve seat portion 42, the communication flow path 32a is closed. |