发明名称 |
Carbon nanotube forming method and pre-treatment method therefor |
摘要 |
A carbon nanotube forming method including providing a target substrate to be processed, a catalytic metal layer being formed on a surface of the target substrate; producing catalytic fine metal particles whose surfaces are oxidized by action of an oxygen plasma on the catalytic metal layer at a temperature T1; and activating the oxidized surfaces of the catalytic fine metal particles by reducing the oxidized surfaces of the catalytic fine metal particles by action of a hydrogen plasma on the catalytic fine metal particles at a temperature T2 higher than the temperature T1. The method further includes growing a carbon nanotube on the activated catalytic fine metal particles by thermal CVD at a temperature T3. |
申请公布号 |
US8728917(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US201213403346 |
申请日期 |
2012.02.23 |
申请人 |
MATSUMOTO TAKASHI;AKIYAMA OSAYUKI;KOIZUMI KENJIRO;TOKYO ELECTRON LIMITED |
发明人 |
MATSUMOTO TAKASHI;AKIYAMA OSAYUKI;KOIZUMI KENJIRO |
分类号 |
H01L21/20;H01L21/36 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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