发明名称 |
Catadioptric projection objective |
摘要 |
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1<10 holds. |
申请公布号 |
US8730572(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US201213470956 |
申请日期 |
2012.05.14 |
申请人 |
SHAFER DAVID;ULRICH WILHELM;DODOC AURELIAN;VON BUENAU RUDOLF M.;MANN HANS-JUERGEN;EPPLE ALEXANDER;BEDER SUSANNE;SINGER WOLFGANG;CARL ZEISS SMT GMBH |
发明人 |
SHAFER DAVID;ULRICH WILHELM;DODOC AURELIAN;VON BUENAU RUDOLF M.;MANN HANS-JUERGEN;EPPLE ALEXANDER;BEDER SUSANNE;SINGER WOLFGANG |
分类号 |
G02B17/00;G02B17/08 |
主分类号 |
G02B17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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