发明名称 |
Semiconductor substrate, electronic device and method for manufacturing semiconductor substrate |
摘要 |
A semiconductor wafer including: a base wafer; a seed crystal disposed on the base wafer; a compound semiconductor disposed above the seed crystal; and a high resistance layer disposed between the seed crystal and the compound semiconductor, the high resistance layer having a larger resistivity than the seed crystal, and the seed crystal lattice matching or pseudo lattice matching the compound semiconductor is provided. |
申请公布号 |
US8729677(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US200913131498 |
申请日期 |
2009.11.26 |
申请人 |
YAMANAKA SADANORI;HATA MASAHIKO;TAKADA TOMOYUKI;SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
YAMANAKA SADANORI;HATA MASAHIKO;TAKADA TOMOYUKI |
分类号 |
H01L29/04 |
主分类号 |
H01L29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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