发明名称 Semiconductor substrate, electronic device and method for manufacturing semiconductor substrate
摘要 A semiconductor wafer including: a base wafer; a seed crystal disposed on the base wafer; a compound semiconductor disposed above the seed crystal; and a high resistance layer disposed between the seed crystal and the compound semiconductor, the high resistance layer having a larger resistivity than the seed crystal, and the seed crystal lattice matching or pseudo lattice matching the compound semiconductor is provided.
申请公布号 US8729677(B2) 申请公布日期 2014.05.20
申请号 US200913131498 申请日期 2009.11.26
申请人 YAMANAKA SADANORI;HATA MASAHIKO;TAKADA TOMOYUKI;SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 YAMANAKA SADANORI;HATA MASAHIKO;TAKADA TOMOYUKI
分类号 H01L29/04 主分类号 H01L29/04
代理机构 代理人
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