| 摘要 |
<p>The present invention relates to an exposure device capable of moving a camera which is used when the position between an exposure object and a mask is controlled. The present invention relates to the exposure device capable of controlling the position between the mask held by mask holders and the exposure object moved by stage units. The present invention comprises a vertical support which is vertically arranged on the upper surface of the support of the exposure device; a camera support frame which comprises a horizontal support which is arranged on the upper surface of the vertical support; a camera unit guide which is formed on the horizontal support; a camera mounting unit which is arranged on the camera unit guide; a plurality of camera units which is mounted on the camera mounting unit and controls the position by photographing an alignment mark formed on the mask and an alignment mark formed on the exposure object; and a camera moving unit which moves the camera mounting unit according to the camera unit guide in left and right direction. The exposure device is provided to easily be managed because the number of cameras is small and reduce the costs of a product.</p> |
