发明名称 Method and system for recycling processing gas for selenization of thin film photovoltaic materials
摘要 A system for recycling a work gas used in a thermal reactor for treating sample materials includes a thermal reactor using a work gas from a first source mixed with carrier gases. The work gas has a boiling point higher than the carrier gases. The system includes a pump, a condenser which converts the work gas into a liquid, and a scrubber.
申请公布号 US8728200(B1) 申请公布日期 2014.05.20
申请号 US201213343473 申请日期 2012.01.04
申请人 WEITING ROBERT D.;STION CORPORATION 发明人 WEITING ROBERT D.
分类号 B01D53/96;B01D5/00;B01D57/00 主分类号 B01D53/96
代理机构 代理人
主权项
地址