发明名称 |
Method and system for recycling processing gas for selenization of thin film photovoltaic materials |
摘要 |
A system for recycling a work gas used in a thermal reactor for treating sample materials includes a thermal reactor using a work gas from a first source mixed with carrier gases. The work gas has a boiling point higher than the carrier gases. The system includes a pump, a condenser which converts the work gas into a liquid, and a scrubber. |
申请公布号 |
US8728200(B1) |
申请公布日期 |
2014.05.20 |
申请号 |
US201213343473 |
申请日期 |
2012.01.04 |
申请人 |
WEITING ROBERT D.;STION CORPORATION |
发明人 |
WEITING ROBERT D. |
分类号 |
B01D53/96;B01D5/00;B01D57/00 |
主分类号 |
B01D53/96 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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