发明名称 |
Probe apparatus and substrate transfer method |
摘要 |
A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers. |
申请公布号 |
US8726748(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US20100939323 |
申请日期 |
2010.11.04 |
申请人 |
OBIKANE TADASHI;YANO KAZUYA;YAMADA HIROSHI;SUZUKI MASARU;YAMAMOTO YASUHITO;TOKYO ELECTRON LIMITED |
发明人 |
OBIKANE TADASHI;YANO KAZUYA;YAMADA HIROSHI;SUZUKI MASARU;YAMAMOTO YASUHITO |
分类号 |
G01D21/00 |
主分类号 |
G01D21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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