| 摘要 |
PROBLEM TO BE SOLVED: To provide a working device having a position correction function capable of solving a problem of positioning accuracy of a driving device.SOLUTION: The working device includes a stage, a working head device, an imaging device, a driving device for relatively moving the working head device and the stage in XYZ directions, and a control device for measuring a positional deviation amount of the working head device. The working device is provided with a linear motion device on which the imaging device and the working head device are mounted and which can reciprocate in X direction or Y direction between a first position and a second position, and mounts the linear motion device on the driving device so that the driving device can reciprocate the linear motion device in the same direction as the reciprocating direction of the linear motion device. The control device calculates a positional deviation amount of the driving device on the basis of a difference between positional deviation amounts(X1, Y1) obtained by performing image processing of a first image for correction which is captured by the imaging device using the linear motion device as the first position and positional deviation amounts (X2, Y2) obtained by performing image processing of a second image for correction which is captured by the imaging device using the linear motion device as the second position. |
