发明名称 MANUFACTURING METHOD OF MAGNETIC DISK SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic disk substrate capable of decreasing scratches and projection defects after polishing process.SOLUTION: The manufacturing method of a magnetic disk substrate includes a step of polishing a polishing object substrate 3. The polishing process uses a holding member 1, for the polishing object substrate, which contains resin. The polishing object substrate holding member satisfies one of conditions (1) and (2) shown below. The condition (1) is that contents of Al, Mg, and Ti metal ions in the holding member 1 are respectively 10 ppm or less. The condition (2) is that a residual amount of ashing process of the holding member 1 is 0.10 mass% or less.
申请公布号 JP2014093098(A) 申请公布日期 2014.05.19
申请号 JP20120241160 申请日期 2012.10.31
申请人 KAO CORP 发明人 YAMAGUCHI TETSUSHI
分类号 G11B5/84;B24B37/28 主分类号 G11B5/84
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