| 摘要 |
PROBLEM TO BE SOLVED: To perform easily and surely detection of service life of an abrasive pad without burying a foreign matter to the abrasive pad.SOLUTION: The detection of service life of an abrasive pad 1 is performed by measuring a macroscopic waviness shape of an abrasive face 1a of the abrasive pad 1 jointed on an auxiliary plate 2 for reproduction and by determining that a difference between the lowest point and the highest point became equal to or more than a predetermined value on the waviness shape. The waviness shape is measured by rotating the abrasive pad 1 and using a laser displacement meter 5 emitting a linear scanning laser beam L passing on the surface. |
