| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique advantageous for measuring a surface to be inspected having a variety of reflectance.SOLUTION: The measuring device comprising a Fizeau type interferometer in which the shape of a surface to be inspected is measured based on an interference signal obtained by light to be inspected which is reflected on the surface to be inspected and reference light reflected on a reference surface is provided on an optical path of the light to be inspected before multiplexed with the reference light, and has a dimming element capable of continuously or gradually changing the permeability of the light to be inspected, and includes a dimming part for adjusting the intensity of the light to be inspected by changing the permeability of the light to be inspected in the dimming element. |
