| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measurement device which can deal with thickness measurement in a wide measurement range promptly and easily, and in which maintenance is easy.SOLUTION: A thickness measurement device 1 has a configuration including: a light source part 20; an optical coupler 21; a measurement head part 3; an optical path length change part 6; a light detection part 25; a measurement control part 26 for acquiring a light intensity signal from the light detection part 25 by changing an optical path length of reference luminous flux Lr, and for measuring the thickness of an object to be inspected 50 from the relation between the position of the peak value and the change of the optical path length; a device body part 2 in which the optical coupler 21 is provided; a holding plate provided attachably/detachably with respect to the device body part 2 and holding the optical path length change part 6; and an attaching/detaching mechanism for attaching/detaching the holding plate by positioning to the device body part 2. |
