| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact type thermometer and a temperature measuring method thereof capable of measuring the temperature of a body whose temperature is measured with high accuracy and good responsibility by bringing a temperature sensing part into a close contact with the body whose temperature is measured by applying a load to the temperature sensing part when the temperature of the body whose temperature is measured is measured.SOLUTION: The contact type thermometer includes: a temperature measuring part 8 for measuring the temperature of a body whose temperature is measured; a temperature sensing part 5 pressurized to the body whose temperature is measured for performing heat transfer between the body whose temperature is measured and the temperature measuring part 8; and a load applying part 10 for applying a contact load N1 to the temperature sensing part 5. The temperature sensing part 5 is configured to be in a close contact with a wafer (body whose temperature is measured) W. |
