| 摘要 |
PROBLEM TO BE SOLVED: To supply an electro-optic device which performs high-quality image display and has high product reliability.SOLUTION: The electro-optic device includes an element, a reflection film disposed to correspond to the element, an insulating film disposed between the reflection film and the element, and an enhanced reflection film disposed on the reflection film. The reflection film includes a titanium film, a titanium nitride film and an aluminum film layered from the insulating film side. In orientations of the layered film, orientation Ti{002} is relatively dominant in the titanium film, TiN{111} is relatively dominant in the titanium nitride film, and orientation Al{111} is relatively dominant in the aluminum film. By this configuration, the surface of the reflection film is made smooth. By constituting the reflection film of a reflection type pixel electrode 9a, regular reflectance can be increased, which results in further improvement in the qualities of a displayed image. As the enhanced reflection film also has waterproof property, the product reliability of the electro-optic device can be improved. |
