发明名称 FILM FORMING APPARATUS
摘要 The present invention relates to an apparatus for forming a vertical film capable of covering the surroundings of a main hearth in an appropriate form. According to an embodiment the apparatus (1) for forming a film is regulated with the horizontal movement of an outer rim (31) by a supporting member (33). Therefore, the outer rim (31) is prevented from falling by being supported by the supporting member (33). Moreover, the rotation of the outer rim (31) can uniformize the thickness of the attachment along the entire circumference. Therefore, the frequency of maintenance can be drastically reduced.
申请公布号 KR20140060221(A) 申请公布日期 2014.05.19
申请号 KR20130109625 申请日期 2013.09.12
申请人 SUMITOMO HEAVY INDUSTRIES, LTD. 发明人 IIO ITSUSHI
分类号 C23C14/32;H01L21/203;H01L21/3065 主分类号 C23C14/32
代理机构 代理人
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