| 摘要 |
PROBLEM TO BE SOLVED: To provide a connector that can hold airtightness in a chamber and obtain secure electrical connection between the inside of the chamber and the outside.SOLUTION: A connector 1 has a multilayer board 10 for blocking an opening portion 91 which is formed in a partition wall 90 so as to penetrate from the inside of an airtight chamber C to the outside thereof. The inner surface side of a first through-hole 23 formed in a first base material 10 is blocked by a second base material 30, a first conductive layer 24 connected to the inner surface side of a first conductive plating 22 of the first through-hole 23 is connected to the outer surface side of a second conductive plating 32 extending between the inner surface 30a and outer surface 30b of the second base material 30. The outer surface side of the first through-hole 23 is blocked by a third base material 40, and a second conductive layer 25 connected to the outer surface side of the first conductive plating 22 is connected to the inner surface side of a third conductive plating 42 extending between the inner surface 40a and outer surface 40b of the third base material 40. |
