| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inspection device capable of detecting shape abnormality of an inspection surface by relatively simple processing.SOLUTION: The inspection device includes: a lighting unit which has a plurality of light sources emitting light mutually different by wavelengths and irradiates an inspection surface by the plurality of light sources while being moved relatively to the inspection surface and has the plurality of light sources located mutually different positions in the direction of the relative movement; an imaging unit which receives reflected light from the inspection surface of the light emitted from the lighting unit while being moved relatively to the inspection surface together with the lighting unit; and a detection unit which detects shape abnormality of the inspection surface on the basis of variation in wavelength of the reflected light received by the imaging unit. |
