| 发明名称 |
CMP PAD WITH MIXED PORE STRUCTURE AND MANUFACTURING METHOD FOR THE SAME |
| 摘要 |
The present invention provides a CMP pad comprising a first pore formed inside the pad and the surface thereof and a second pore formed on the surface of the pad, wherein the first pore has a diameter of 20 to 200 μm and a porosity of 10 to 30%, and the second pore has a diameter of 250 to 500 μm and an area of 10 to 40% with respect to the total area of the CMP pad. |
| 申请公布号 |
KR20140060160(A) |
申请公布日期 |
2014.05.19 |
| 申请号 |
KR20120126926 |
申请日期 |
2012.11.09 |
| 申请人 |
RION SMI, INC. |
发明人 |
KIM, GEON;KIM, SUNG MIN;JEONG, JAE SANG;BYUN, JAE JUNG;JUNG, HUN KUOUNG |
| 分类号 |
B24B37/24;B24B37/26;B24D3/32;H01L21/304 |
主分类号 |
B24B37/24 |
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