发明名称 OPTICAL INTERFERENCE TOMOGRAPHIC IMAGING APPARATUS AND OPTICAL INTERFERENCE TOMOGRAPHIC IMAGING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an optical interference tomographic imaging apparatus that is able to carry out differential detection by a simple configuration without requiring a plurality of spectrometers or detectors.SOLUTION: An optical interference tomographic imaging apparatus splits light from a light source part into measurement light and reference light by use of a splitting part. The apparatus causes light reflected or scattered from a target inspection object irradiated with the measurement light, and reference light corresponding to the measurement light to interfere with each other by use of an interference part. The apparatus causes a light detection part to receive the interference light subjected to interference by the interference part, and detect the intensity of the interference light. On the basis of the intensity of the interference light detected by the detection part, the apparatus acquires a tomographic image of the target inspection object. The interference part is configured to output first interference light and second interference light that are different in the phase of an interference component by an amount &pgr;. The first interference light and second interference light output from the interference part can reach the detection part so as to have a time difference.
申请公布号 JP2014092425(A) 申请公布日期 2014.05.19
申请号 JP20120242529 申请日期 2012.11.02
申请人 CANON INC 发明人 OTA TAKEFUMI
分类号 G01N21/17;G01N21/39 主分类号 G01N21/17
代理机构 代理人
主权项
地址