发明名称 OPTICAL MEASUREMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an optical measurement method that is able to reduce periodic noise.SOLUTION: An optical measurement method according to the invention comprises: (1) a data acquisition step in which light reflected from a sample is detected, and a relation between the a reflected position in a sample in a plurality of time zones or wavelength bands and a quantity of reflected light is acquired; and (2) a data processing step in which based on the relation, an absorption component included in the attenuation of the quantity of reflected light with respect to a quantity of incident light and a scatter component are separately obtained. The data processing step includes: (a) in which the absorption component and the scatter component are obtained so that a target function including the quantity of reflected light, the absorption component, the scatter component, and the spatial secondary function of the absorption component and the spatial secondary function of the scatter function is minimized; and (b) in which when the respective spatial secondary functions of the absorption component and scatter component of the target function are obtained, a plurality of secondary differential operators with spatial frequency characteristics different from each other are caused to act on the absorption component and the scatter component.
申请公布号 JP2014092438(A) 申请公布日期 2014.05.19
申请号 JP20120242759 申请日期 2012.11.02
申请人 SUMITOMO ELECTRIC IND LTD 发明人 HIRANO MITSUHARU
分类号 G01N21/17 主分类号 G01N21/17
代理机构 代理人
主权项
地址