| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform analysis of a desired portion promptly.SOLUTION: A cross section analysis device includes: a chamber 1; a sample stage 3; a gallium ion gun 7 for emitting a gallium ion beam 17 which exposes a processing cross section 15; an electron gun 9 for irradiating the processing cross section 15 with an electron beam 19; an Auger electron spectroscope 13 for detecting an Auger electron 23 emitted from the processing cross section 15; and a secondary electron detector 11 for detecting a secondary electron 21 emitted from the processing cross section 15. The irradiation direction of the electron beam 19 is vertical with respect to an upper surface of the sample stage 3. The gallium ion gun 7 is arranged obliquely with respect to the upper surface of the sample stage 3. The Auger electron spectroscope 13 and the secondary electron detector 11 are arranged on the opposite side, seen from the gallium ion gun 7, with the electron gun 9 sandwiched in-between.</p> |
