| 摘要 |
PROBLEM TO BE SOLVED: To precisely inspect an object.SOLUTION: A inspection device and an inspection method include: an inspection part 18 which inspects a surface 11 of an object 10 by comparing the surface 11 of the object 10 with a surface of a comparison body; a stage 14 which holds the object 10 and to which a correction surface 13 is fixed; a detection part 18 which detects a first angle that the surface 11 of the object 10 and the correction surface 13 form; and a correction part 20 which corrects a tilt of the stage 14 based upon the first angle. |
