NON-CONTACT TYPE ELECTRIC INSPECTION DEVICE AND ELECTRIC INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a non-contact type electric inspection device and an electric inspection method capable of determining whether a plurality of patterns formed on a test object body are disconnected or not, and short-circuit or not.SOLUTION: The electric inspection device includes: electron supply means 110 for generating electrons electrifying one surface of a test object body 50 in a vacuum space 1; electron transfer guiding means 120 for separating from the other surface of the test object body 50 and for guiding the electrons electrifying one surface of the test object body 50 so that the electrons transfer to non-contact type; high voltage application means 140 for forming an electric field in the vacuum space 1 and the electron transfer guiding means 120 so that the electrons electrifying one surface of the test object body 50 transfer to the electron transfer guiding means 120 via the other surface of the test object body 50; electric current and voltage measurement means 130 for measuring an electric current and a voltage arising from a flow of the electrons guided to move to the electron transfer guiding means 120; and controlling means 160 for determining whether a plurality of patterns formed on the test object body 50 are disconnected or not, and short-circuit or not.