METHOD FOR MANUFACTURING ORGANIC SAMPLE FOR SURFACE ANALYSIS, AND SURFACE ANALYSIS METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for an organic sample for surface analysis capable of being used for component analysis of nanometer order without losing organic information on the analyzed surface and with improvement in space analysis ability of depth direction analysis, and also to provide a surface analysis method using the same.SOLUTION: A method for manufacturing an organic sample 1 for surface analysis includes a step in which a recess 5 having an inclined cross section 7 for analysis is formed on the surface of the organic sample 1 by irradiating the surface of the organic surface 1 with gas cluster ion beams 3. Moreover, a surface analysis method is characterized in that analysis of the inclined cross section 7 of the organic sample 1 for surface analysis manufactured by the method for manufacturing the organic sample is analyzed.