| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming method and a thin film forming device capable of preventing generation of a crack or exfoliation on a formed thin film, while preventing occurrence of empty slippage on a main roll during conveyance of a film sheet.SOLUTION: In a thin film forming method and a device for forming a thin film on a belt-like substrate by performing surface treatment while conveying the belt-like substrate in the state where the belt-like substrate is placed along the outer peripheral surface of a main roll, tension applied to the belt-like substrate is measured and simultaneously adjusted, and the tension applied to the belt-like substrate when a thin film is formed by rotating the main roll at fixed speed is set lower than tension at the rotation acceleration time or tension at the rotation deceleration time of the main roll. |
