OPTICAL BIOSENSOR AND MANUFACTURING METHOD THEREOF

摘要

According to an embodiment of the present invention, an optical biosensor comprises a first layer; a second layer laid on the first layer; a first grating coupler between the first and second layers to couple a supplied optical pattern to the front side of the optical biosensor; and a second grating coupler on the first layer to output the coupled optical pattern into a photoelectric conversion element on the rear side of the optical biosensor.