| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for mounting optical semiconductor element, which has a structure having a porous ceramic layer and a dense layer, capable of providing a satisfactory light reflectance and an excellent heat-radiation performance while reinforcing the porous ceramic layer, manufacturing method thereof and optical semiconductor device.SOLUTION: An LTCC/HTCC multilayer substrate 10 is produced by laminating a dense layer 11A and a porous layer 11B. The porous layer 11B includes a first glass layer 111B, an LTC layer 112 (porous ceramic layer) and a second glass layer 111A laminated in order over the dense layer 11A. The LTC layer 112 includes a glass component and a ceramic filler; the porosity is 10-40%; and the glass component concentration at least one plane of both sides in a thickness direction is higher than average glass component concentration of the layer. The dense layer 11A contains a ceramic component and has the flexural strength higher than that of the LTC layer 112. |
