| 摘要 |
PURPOSE: A chemical liquid coating device is provided to control the inner pressure of a reservoir and rheological features of chemical liquid. CONSTITUTION: A head(240) has a nozzle surface(242). A body(212) moves in at least one direction. A reservoir(220) receives chemical liquid from a chemical liquid supply source. The reservoir supplies the chemical liquid to nozzles. A heater(250) heats the chemical liquid. A pressure adjusting valve is installed in an air pressure line. A pressure controller receives a temperature value from a temperature sensor(252) in real time. The pressure controller compensates for a change of inner pressure based on a temperature by control of the pressure controller. |
