Thermal treatment device for use in enclosure for thermal treatment of e.g. solid material, in field of vapor phase deposition of layer, has crucible formed by wall extended partially into fluid circulation chamber of regulation unit

摘要

The device (1) has a crucible (2) formed by a wall (3) that delimits interior volume (4) to receive a material to be treated. A regulation unit (6) regulates temperature of the crucible, where the unit is in contact with the wall of the crucible. The regulation unit includes a fluid circulation chamber (7) and a fluid temperature regulation unit. The wall of the crucible is extended partially into the circulation chamber. The chamber includes an inlet (12) and an outlet (13), and the fluid circulates continuously into the chamber between the inlet and the outlet. An independent claim is also included for an enclosure for thermal treatment of material.