| 摘要 |
<p>A substrate transferring facility includes: a ceiling transfer cart which is driven along a driving rail to transfer a container to a container transfer place; a substrate transfer apparatus which withdraws a substrate from the container placed on a container withdrawal place and transfers the substrate to a substrate processing apparatus; and a relay transfer apparatus which moves a mounting unit for mounting the container and transfers the container between the container transfer place and the substrate withdrawal place. The substrate transfer apparatus is capable of withdrawing the substrate from the container placed on the substrate withdrawal place, and transferring the substrate to the substrate processing apparatus.</p> |
