发明名称 DICING SHEET SUBSTRATE FILM AND DICING SHEET
摘要 A base film 2 for a dicing sheet is provided which can suppress dicing debris from generating during the dicing of a cut object without imparting physical energy, such as electron beam or ³ ray. The base film 2 for a dicing sheet comprises a resin layer (A). The resin layer (A) comprises: a norbornene-based resin (a1) that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin (a2) other than the norbornene-based resin (a1). The norbornene-based resin (a1) in the resin layer (A) has a content of more than 3.0 mass%. A dicing sheet 1 is also provided which comprises: the base film 2 for a dicing sheet; and a pressure-sensitive adhesive layer 3 placed on a surface of the film at the resin layer (A) side.
申请公布号 KR20140059793(A) 申请公布日期 2014.05.16
申请号 KR20147005865 申请日期 2012.09.05
申请人 LINTEC CORPORATION 发明人 TAYA NAOKI;UEDA MASASHI;SATO YOSUKE;ITO MASAHARU
分类号 H01L21/301;C09J7/02 主分类号 H01L21/301
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