TRANSPARENT-CONDUCTIVE-FILM LAMINATE, MANUFACTURING METHOD THEREFOR, THIN-FILM SOLAR CELL, AND MANUFACTURING METHOD THEREFOR

摘要

Provided is a transparent-conductive-film laminate that has a low optical absorptance, exhibits a superb optical confinement effect, and is useful as a surface electrode when manufacturing a high-efficiency silicon thin-film solar cell. Also provided are a method for manufacturing said transparent-conductive-film laminate, a thin-film solar cell using said transparent-conductive-film laminate, and a method for manufacturing said thin-film solar cell. This transparent-conductive-film laminate has a structure in which an iridium-oxide transparent conductive film (I) formed with a surface roughness (Ra) of at most 1.0 nm and a zinc-oxide transparent conductive film (II) formed on top of said iridium-oxide transparent conductive film (I) are provided on top of a light-transmitting substrate. The laminate has a surface roughness (Ra) of at least 30 nm, a haze percentage of at least 8%, a sheet resistance of at most 30 &OHgr;/sq, and a mean absorptance of at most 15% with respect to light in the 400-1,200 nm wavelength range.