MANUFACTURING METHOD FOR SOLAR BATTERY AND SOLAR BATTERY MANUFACTURING APPARATUS USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method capable of effectively removing metal and organic matter of a substrate surface after anisotropic etching is performed with alkaline solution for formation of a texture.SOLUTION: After irregularities are formed on a surface of an n-type single crystal silicon substrate 1 with alkaline solution, an ozone concentration of ozone water 24 is monitored to be constant with an ozone concentration monitor 33 and while ozone CT is being controlled, the ozone water 24 is supplied to an n-type single crystal silicon substrate 1 for solar battery.