| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for forming a crystal semiconductor layer on a substrate for a photovoltaic element for a solar cell which is improved in efficiency of photovoltaic power generation and reduced in cost.SOLUTION: A semiconductor layer is formed through vapor-phase deposition. A pulse laser fusion/recrystallization process is carried out to convert the semiconductor layer into a crystal layer. Pulses of a laser or other electromagnetic radiation are generated in pulse trains 120-120and distributed uniformly over treatment zones, and successive adjacent treatment zones are exposed to the pulse trains 120-120to progressively convert a deposited material into a crystal material. |
