BEAKING APPARATUS OF BRITTLE MATERIAL SUBSTRATE AND BEAKING METHOD OF BRITTLE MATERIAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a breaking apparatus of a brittle material substrate and a breaking method of a brittle material substrate, capable of reducing cost of an adhesive film by enabling break of a substrate without using the adhesive film.SOLUTION: A substrate 100 is sucked and held on an elastic sheet member 101 by exhausting between the substrate 100 and the elastic sheet member 101 through a suction groove 72 and a suction port 71 by action of an exhaust part 74. When the substrate 100 is pressed by a break bar 14 in this state, a bending stress is generated in the substrate 100 by elastic force of the elastic sheet member 101, thereby breaking the substrate 100 at a position corresponding to a scribe line 99.