发明名称 |
PRESSURE-LESS OZONATED D I -WATER (DI03) RECIRCULATION RECLAIM SYSTEM AND METHOD |
摘要 |
The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure. |
申请公布号 |
WO2014074455(A1) |
申请公布日期 |
2014.05.15 |
申请号 |
WO2013US68304 |
申请日期 |
2013.11.04 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
SEIWERT, JOHANNES, HEINRICH;BRAMMER, ULRICH, ALFRED;BLACHA, MARTIN;SCHNAITER, GERHARD, JOACHIM |
分类号 |
C02F1/20;C02F1/78;C02F103/34;G03F7/42;H01L21/02 |
主分类号 |
C02F1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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