发明名称 PRESSURE-LESS OZONATED D I -WATER (DI03) RECIRCULATION RECLAIM SYSTEM AND METHOD
摘要 The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure.
申请公布号 WO2014074455(A1) 申请公布日期 2014.05.15
申请号 WO2013US68304 申请日期 2013.11.04
申请人 MKS INSTRUMENTS, INC. 发明人 SEIWERT, JOHANNES, HEINRICH;BRAMMER, ULRICH, ALFRED;BLACHA, MARTIN;SCHNAITER, GERHARD, JOACHIM
分类号 C02F1/20;C02F1/78;C02F103/34;G03F7/42;H01L21/02 主分类号 C02F1/20
代理机构 代理人
主权项
地址