| 发明名称 |
METHOD FOR FORMING ALUMINA FILM AND SOLAR CELL ELEMENT |
| 摘要 |
A solar cell element and a method for forming an alumina film are disclosed. The method comprises: preparing a substrate; supplying sources of an aluminum source material that contains aluminum atoms and an oxygen source material that contains oxygen atoms comprising H2O and O3 to the substrate; and forming an alumina film on the substrate. |
| 申请公布号 |
US2014130860(A1) |
申请公布日期 |
2014.05.15 |
| 申请号 |
US201214129518 |
申请日期 |
2012.06.27 |
| 申请人 |
ITO NORIKAZU;MURAO AKIRA;ONODERA MAKOTO;ITO TAKESHI;KYOCERA CORPORATION |
发明人 |
ITO NORIKAZU;MURAO AKIRA;ONODERA MAKOTO;ITO TAKESHI |
| 分类号 |
H01L31/0232 |
主分类号 |
H01L31/0232 |
| 代理机构 |
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